RayResearch Corporation|Semiconductor Inspection System | Solar Cell Inspection System

■Wafer Automatic Appearance Inspection System

This system is wafer automatic inspection system of the compound type equipped with surface inspection unit and back inspection unit.
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■Wafer Surface Automatic Inspection System

This inspection system automatically detects defects on the wafer surface. We can suggest the optimum system by actually imaging and inspecting the detection target.
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■Wafer Thickness Measuring System

This system is the wafer thickness measuring system with transfer function and thickness measuring function. Can be customized according to customer specifications.
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■Washing Machine

This equipment cleans the wafer surface after dicing with two fluids, pure water and air. Various arrangements are available according to the intended use.
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■Wafer Transfer Machine

This is transfer machine that can transfer wafers automatically. The wafer is taken out from the cassette, transferred to the measuring machine, and the wafer after measurement is automatically transferred to the original cassette shelf. It is possible to correspond to the desired measuring machine and inspection machine.
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■Wafer Transfer Machine For Inline

This is transfer machine of inline support that can transfer wafers automatically. The wafer is taken out from the wafer receiving stage and automatically transferred to the measurement unit. After the measurement, the wafer can be stored in the designated unloader cassette. It is possible to correspond to the desired measuring machine and inspection machine.
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■EFEM

This EFEM can be connected to the desired module machine.

We will support to customized specifications according to usage.
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■Wafer sorter　TR100 series

The wafer sorter is made up with the customer, the customizing product can be offered. corresponds to consultation of carrier method of a thick wafer and a thin wafer.
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■Wafer transportation unit　TR100-mini

TR100-mini realized small size, space-saving than the conventional wafer transportation machine. The demand function of the customer is supported and customizable.
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■FOUP Opener FO-300

FO-300 is front open type to open and close the FOUP door by the automatic operation. The demand function of the customer is supported and customizable.
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■Defect inspection system

This system can detect the defects (Surface / Back side / internal) of the work. The best light and camera are selected from the detection object of the customer and the purpose of customer's use. Then do the test inspection of the customer's inspection target and really do the inspection processing.
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