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Wafer Thickness Measuring System
Wafer Thickness Measuring System

This system is the wafer thickness measuring system with transfer function and thickness measuring function. It is possible to measure the thickness of each point in the specified wafer. 6 inch and 8 inch are supported.


Wafer size 150mm, 200mm
Wafer transportation method

Bernoulli method

System configuration ETransportation unit
ELoader / unloader unit (4 carriers installed)
EAlignment unit
EID recognition unit (for 8-inch glass only)
EThickness measurement unit
EUpward communication function (option)

1580(W)~1580(D)~1900(H) mm

* This dimension doesn't contain the height of the protrusion.

* This is an example of the product specification. We supports customized specifications.