This system is the wafer thickness measuring system with transfer function and thickness measuring function. It is possible to measure the thickness of each point in the specified wafer. 6 inch and 8 inch are supported.
Wafer size
150mm, 200mm
Wafer transportation method
Bernoulli method
System configuration
ETransportation unit
ELoader / unloader unit (4 carriers installed)
EAlignment unit
EID recognition unit (for 8-inch glass only)
EThickness measurement unit
EUpward communication function (option)
Dimension
1580(W)~1580(D)~1900(H) mm
* This dimension doesn't contain the height of the protrusion.
* This is an example of the product specification. We supports customized specifications.