RayResearch Corporation|Semiconductor Inspection System | Solar Cell Inspection System

Wafer Transfer Machine For Inlin

The wafer is taken out from the wafer receiving stage and automatically transferred to the measurement unit. After the measurement, the wafer can be stored in the designated unloader cassette. We will correspond to your desired measuring machine and inspection machine.

Wafer size	200mm, 300mm
Wafer transportation method	Back side adsorption method
System configuration	・Transportation unit ・Receiving stage unit ・Loader / unloader unit ・Alignment unit ・ID reader unit ・Measurement unit (can be equipped with the desired measuring machine or inspection machine) ・Upward communication function (option)
Dimension	3200(W)×2350(D)×1600(H) mm * This dimension doesn't contain the height of the protrusion.

* This is an example of the product specification. We supports customized specifications.