The optics design and algorithm are customized. |
|
Wavelength |
Inspection target |
Ultraviolet light |
10nm ` 400nm |
Minute scratch, etc |
Visible light |
400nm ` 700nm |
Scratch, Particle, etc
|
Near-infrared light |
0.7ƒÊm ` 2.5ƒÊm |
Interior defect, etc |
Far-infrared light |
4ƒÊm ` 1mm |
Thermal detector, etc
(Thermal distribution/Thermometry) |
|
|