The optics design and algorithm are customized. |
|
Wavelength |
Inspection target |
Ultraviolet light |
10nm ~ 400nm |
Minute scratch, etc |
Visible light |
400nm ~ 700nm |
Scratch, Particle, etc
|
Near-infrared light |
0.7μm ~ 2.5μm |
Interior defect, etc |
Far-infrared light |
4μm ~ 1mm |
Thermal detector, etc
(Thermal distribution/Thermometry) |
|
|