RayResearch Corporation|Semiconductor Inspection System | Solar Cell Inspection System

Wafer sorter　TR100 series

This system can add the transportation mode of customer specifications. For example, the upward communication, the lot division, and the lot integration, etc. Contributes to productivity improvement and yield rate deterioration in mass production line.

Wafer size	150mm to 200mm Orientation flat
Wafer transportation method	Back side adsorption
System configuration	・Transportation unit ・Cassette stage unit (4 cassettes)* 1 loader / 3 unloaders ・alignment unit ・ID recognition unit (option) ・Upward communication function (option)
Dimension	*1100(W)×1200(D)×1300(H)　mm This dimension doesn't contain the height of the signal tower.**

* This is an example of the product specification. We supports customized specifications.