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@@Solar cell Semiconductor
EFEM

EFEM

The wafer set in the loader is taken out by the transfer robot. After alignment, the wafer is reversed and transferred to the module machine stage. Then the wafer is automatically transferred to the original cassette.

It can be connected to the desired module machine.


specification

Wafer size 300mm
Wafer transportation method

Back side adsorption method

System configuration

ETransportation unit
ELoader unit
EAlignment unit
EStage unit for module machine

(can be connected to the desired module machine)
EUpward communication function (option)

Dimension

2070(W)~1650(D)~1860(H) mm

* This dimension doesn't contain the height of the protrusion.

* This is an example of the product specification. We supports customized specifications.