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Wafer carrier distortion tester ASI-10
Wafer carrier distortion tester ASI-10

ASI-10 can inspect the distortion of the wafer carrier. The inspection is possible without using the dummy wafer. Inspection time is 10 seconds in one carrier. After completing the inspection, the result is given by the OK / NG LED's. If the carrier is NG the NG LED light up. Inspection is done by sensing the pressure differences that occur between air outlet and air inlet nozzles as a result of the carrier profile, in this way non-contact inspection is achieved.


Short cycle time inspection without using dummy wafer.
Adopts non-contact comparison inspection by the air micro gauge.
Just load the carrier and push the button.