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@@Solar cell Semiconductor
Wafer Transfer Machine
Wafer Transfer Machine

The wafer is taken out from the cassette and automatically transferred to the measurement unit. After the measurement is completed, the wafer can be stored in the original cassette shelf. We will correspond to your desired measuring machine and inspection machine.

specification

Wafer size 200mm, 300mm
Wafer transportation method

Back side adsorption method

System configuration

ETransportation unit
ELoader / unloader unit
EAlignment unit
EID reader unit
EMeasurement unit

(can be equipped with the desired measuring machine or inspection machine)
EUpward communication function (option)

Dimension

1925(W)~1593(D)~1705(H) mm

* This dimension doesn't contain the height of the protrusion.

* This is an example of the product specification. We supports customized specifications.