RayResearch Corporation|Semiconductor Inspection System | Solar Cell Inspection System

Wafer Automatic Appearance Inspection System

This is the wafer automatic appearance inspection system equipped with surface inspection unit and back inspection unit. From visual inspection by the operator corresponds to automation of inspection system.

Wafer size	300mm　V Notch
Wafer transportation method	Edge grip method
System configuration	・Transportation unit ・FOUP openers (2 units) ・Alignment unit ・Inspection unit (Surface inspection unit and Back inspection unit) ・Upward communication function (option)
Dimension	1655(W)×2175(D)×2000(H) mm * This dimension doesn't contain the height of the protrusion.

* This is an example of the product specification. We supports customized specifications.