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@@Solar cell Semiconductor
Wafer transportation unit@TR100-mini
Wafer transportation unit@TR100-mini

This system can add the transportation mode of customer specifications. For example, the parallel transportation, the lot division, the lot integration, and the specified transportation, etc. This system has prepared the user port, therefore can unite with inspection unit etc. The use can support usage in accord with the needs of the customer including the inspection machine use or transportation machine use.


Wafer size 100mm to 200mm OF and notch
Wafer transportation method Back side adsorption
System configuration ETransportation unit
ECassette stage unit (Usually 2 cassettes)
@ * The cassette can set 6 cassettes at the maximum. (Option)
EAlignment unit
EID recognition unit (Option)
EUpward communication function (option)
Dimension 1100(W)~1200(D)~1300(H)mm * This dimension is two ports.