RayResearch Corporation|Semiconductor Inspection System | Solar Cell Inspection System

Wafer transportation unit　TR100-mini

This system can add the transportation mode of customer specifications. For example, the parallel transportation, the lot division, the lot integration, and the specified transportation, etc. This system has prepared the user port, therefore can unite with inspection unit etc. The use can support usage in accord with the needs of the customer including the inspection machine use or transportation machine use.

Wafer size	100mm to 200mm OF and notch
Wafer transportation method	Back side adsorption
System configuration	・Transportation unit ・Cassette stage unit (Usually 2 cassettes) 　 * The cassette can set 6 cassettes at the maximum. (Option) ・Alignment unit ・ID recognition unit (Option) ・Upward communication function (option)
Dimension	*1100(W)×1200(D)×1300(H)mm This dimension is two ports.**