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Wafer Surface Automatic Inspection System
Wafer Surface Automatic Inspection System

This inspection system automatically detects defects on the wafer surface. From visual inspection by the operator corresponds to automation of inspection system. We can suggest the optimum system by actually imaging and inspecting the detection target.

Features

Defects on the wafer surface can be detected automatically.
Realizes automation of visual inspection.
We can suggest the optimum system by actually imaging and inspecting the detection target.