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@@Solar cell Semiconductor
Washing Machine
Washing Machine

This equipment cleans the wafer surface after dicing with two fluids, pure water and air. Controls the re-adhesion of airborne dust with the originally developed wash cup.


Ring frame size 200mm, 300mm
Wafer transportation method

Transfer from upper or lower wafer cassette can be selected

System configuration ELoader / unloader unit
ETransportation unit
EWashing unit

800(W)~1400(D)~1700(H) mm

* This dimension doesn't contain the height of the protrusion.

* This is an example of the product specification. We supports customized specifications.