| Wafer size |
125mm square / 156mm square |
| Wafer type |
Mono crystal wafer / Multi crystal wafer
|
| Processing speed |
1 second / wafer
|
| Number of loaders |
5 loaders
|
| The number of sets of 1 loader |
200 wafers
|
| Maximum number of wafers |
5 loaders x 200 wafers = 1000 wafers
|