Wafer size |
125mm square / 156mm square |
Wafer type |
Mono crystal wafer / Multi crystal wafer
|
Processing speed |
1 second / wafer
|
Number of loaders |
5 loaders
|
The number of sets of 1 loader |
200 wafers
|
Maximum number of wafers |
5 loaders x 200 wafers = 1000 wafers
|