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Solar Cell Transportation TR-1000L
Module EL Inspection System MEI

This system can inspect the crack inspection, electric short-circuit inspection and scratch inspection. The thermal inspection unit by the wiring short circuit can be installed with the option. This system supports in-line method or off-line method.


System throughput is 1 second/wafer at high speed.
The wafer size inspects 125mm square and 156mm square.
This system transports the stacked wafer in 1 second / wafer.